JPH0729627Y2 - 縦型構造の炉芯管 - Google Patents
縦型構造の炉芯管Info
- Publication number
- JPH0729627Y2 JPH0729627Y2 JP1988168240U JP16824088U JPH0729627Y2 JP H0729627 Y2 JPH0729627 Y2 JP H0729627Y2 JP 1988168240 U JP1988168240 U JP 1988168240U JP 16824088 U JP16824088 U JP 16824088U JP H0729627 Y2 JPH0729627 Y2 JP H0729627Y2
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- peripheral wall
- inner diameter
- quartz glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 239000012779 reinforcing material Substances 0.000 description 7
- 238000003466 welding Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988168240U JPH0729627Y2 (ja) | 1988-12-28 | 1988-12-28 | 縦型構造の炉芯管 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988168240U JPH0729627Y2 (ja) | 1988-12-28 | 1988-12-28 | 縦型構造の炉芯管 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0289826U JPH0289826U (en]) | 1990-07-17 |
| JPH0729627Y2 true JPH0729627Y2 (ja) | 1995-07-05 |
Family
ID=31457244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988168240U Expired - Lifetime JPH0729627Y2 (ja) | 1988-12-28 | 1988-12-28 | 縦型構造の炉芯管 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0729627Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5347319B2 (ja) * | 2008-04-30 | 2013-11-20 | 信越半導体株式会社 | 縦型熱処理装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62101025A (ja) * | 1985-10-28 | 1987-05-11 | Toshiba Corp | 半導体製造治具 |
| JPS62162835U (en]) * | 1986-04-03 | 1987-10-16 |
-
1988
- 1988-12-28 JP JP1988168240U patent/JPH0729627Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0289826U (en]) | 1990-07-17 |
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